Computational Modeling in Semiconductor Processing

Autor*innen

• M. Meyyappan

Parameter

• 384 Seiten
• 14 Lesestunden

• Informatik & Programmierung

Mehr zum Buch

This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation -- so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.

• Sprache: Englisch
• Erscheinungsdatum: 1995
• Einband: Hardcover