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Semiconductor Materials and Process Technology Handbook

For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)

Autor*innen

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This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.

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Semiconductor Materials and Process Technology Handbook, Gary E. McGuire

Sprache
Erscheinungsdatum
1988
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(Hardcover)
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Titel
Semiconductor Materials and Process Technology Handbook
Untertitel
For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)
Sprache
Englisch
Autor*innen
Gary E. McGuire
Erscheinungsdatum
1988
Einband
Hardcover
Seitenzahl
688
ISBN10
0815511507
ISBN13
9780815511502
Reihe
Beschreibung
This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.