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David Gross

    Copper metallization on silicon power devices for heavy copper wire-bonding
    Animal Models in Cardiovascular Research
    Color
    • Color

      • 385 Seiten
      • 14 Lesestunden
      4,2(11)Abgeben

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    • The third edition offers comprehensive insights into the use of animal models in cardiovascular research, reflecting a growing interest in the field. It serves as an essential resource for researchers needing to understand normal cardiovascular function and its applications in various studies. The updated content ensures that readers have access to the latest information and methodologies relevant to their work in cardiovascular research.

      Animal Models in Cardiovascular Research
    • The use of heavy copper wire-bonds as topside contact in the assembly and interconnect technology of silicon-based power modules promises a more than tenfold increase of the thermal cycling reliability of the assembly over the currently used heavy aluminum wires. This increase is contrasted by the increased hardness of copper over aluminum. To date, the higher hardness of the thick copper wires requires a higher bonding force and ultrasonic power for an adequate bond formation which induces a strong deformation of the available power device topside metallizations and leads to a destruction of the devices. Based on the state-of-the-art Back-End-of-Line process chain, a new copper metallization scheme is developed. The plan is adapted for specific process steps to acknowledge the characteristic differences of the deposition and usage of copper on silicon devices. At the end, a copper metallization is presented which allows for the use of heavy copper wire-bonding on silicon power devices.

      Copper metallization on silicon power devices for heavy copper wire-bonding