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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Buchkauf
Scanning electron microscopy, Ludwig Reimer
- Sprache
- Erscheinungsdatum
- 1998
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- Titel
- Scanning electron microscopy
- Sprache
- Englisch
- Autor*innen
- Ludwig Reimer
- Verlag
- Springer
- Erscheinungsdatum
- 1998
- ISBN10
- 3540639764
- ISBN13
- 9783540639763
- Kategorie
- Physik
- Beschreibung
- Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.