Etching in microsystem technology

Autor*innen

• Michael Köhler

Parameter

• Technik & Maschinenbau

Mehr zum Buch

Explaining the scientific fundamentals of etching processes which occupy a key position in microfabrication this work is a practical guide for etching processes. The practical section is set out like a cookery book: it gives recipes for many etching processes and helps to produce perfect microstructures.

• Sprache: Englisch
• Erscheinungsdatum: 1999