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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Buchkauf
Scanning Electron Microscopy, Rudolf Reichelt
- Sprache
- Erscheinungsdatum
- 2010
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- (Hardcover)
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