Uncertainty in measurement of piezoresistive sensors

The development of piezoresistive sensors has its origin in the 1950s with the discovery of the piezoresistive effect in silicon and germanium by Charles S. Smith. After more than 50 yaers of development, piezoresistive sensors are still scientifically attractive and represent a significant fraction of commercial silicon micromachined sensors. In this volume of the book series “Dresden Contributions to Sensor Technology” the uncertainty in measurement of piezoresistive sensors has been analysed according to the ISO “Guide to the Expression of Uncertainty in Measurement” (GUM). For this purpose, an improved sensor signal model was developed which considers a combined standard uncertainty of the measurement result. The investigation focused on the influence of electronic and climate disturbances on the behaviour of piezoresistive sensors. The possible origins of uncertainty in measurement have been discussed considering the sensor passivation and the influence of the charge carriers. The experimental investigation of different piezoresistive pressure and humidity sensors under appropriate climatic conditions presents the state of the art in piezoresistive sensor technology.