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Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
Buchkauf
Silicon anodization as a structuring technique, Alexey Ivanov
- Sprache
- Erscheinungsdatum
- 2018
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- (Paperback)
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