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Focusing on the physics and materials science, this book delves into ion implantation and ion beam modification, crucial for silicon integrated circuit technology. It discusses the intricacies of ion-solid interactions, predicting ion ranges, and addressing lattice disorder. The text covers essential processes like shallow-junction formation and the innovative use of hydrogen ion beams for silicon slicing. Additionally, it explores topics such as ion-beam mixing, stresses, and sputtering, highlighting their significance in enhancing materials properties and performance.
Buchkauf
Ion Implantation and Synthesis of Materials, James W. Mayer, Michael Nastasi
- Sprache
- Erscheinungsdatum
- 2010
- product-detail.submit-box.info.binding
- (Paperback)
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- Titel
- Ion Implantation and Synthesis of Materials
- Sprache
- Englisch
- Autor*innen
- James W. Mayer, Michael Nastasi
- Erscheinungsdatum
- 2010
- Einband
- Paperback
- Seitenzahl
- 280
- ISBN13
- 9783642062599
- Kategorie
- Naturwissenschaften
- Beschreibung
- Focusing on the physics and materials science, this book delves into ion implantation and ion beam modification, crucial for silicon integrated circuit technology. It discusses the intricacies of ion-solid interactions, predicting ion ranges, and addressing lattice disorder. The text covers essential processes like shallow-junction formation and the innovative use of hydrogen ion beams for silicon slicing. Additionally, it explores topics such as ion-beam mixing, stresses, and sputtering, highlighting their significance in enhancing materials properties and performance.