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Focusing on the latest advancements in optical sensors, the book explores their application in precision nanometrology for measuring angle and displacement. It details scanning-type measuring systems designed for analyzing surface forms and stage motions, complemented by algorithms and experimental data that enhance understanding and implementation.
Buchkauf
Precision Nanometrology, Wei Gao
- Sprache
- Erscheinungsdatum
- 2014
- product-detail.submit-box.info.binding
- (Paperback)
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- Titel
- Precision Nanometrology
- Untertitel
- Sensors and Measuring Systems for Nanomanufacturing
- Sprache
- Englisch
- Autor*innen
- Wei Gao
- Verlag
- Springer London
- Erscheinungsdatum
- 2014
- Einband
- Paperback
- Seitenzahl
- 372
- ISBN13
- 9781447157434
- Kategorie
- Naturwissenschaften
- Beschreibung
- Focusing on the latest advancements in optical sensors, the book explores their application in precision nanometrology for measuring angle and displacement. It details scanning-type measuring systems designed for analyzing surface forms and stage motions, complemented by algorithms and experimental data that enhance understanding and implementation.